Semiconductor Fabrication Laboratory SCL 1349D

• Equipment: Class 1,000 clean room facility, wet bench, aligner, Thernco minibrute furnace, microscope, step profilometer, work benches, oven, curve tracer, fume hood; DI water system, resist spinner, metal evaporation system, HP 4145 with microprobes, chemical cabinets, power connections, yellow lights, vacuum pump, nitrogen with regulator, reactive io etcher.
• Courses: EEE 166, EEE 270
• Coordinators: Dr. C. Colinge
• Access Level: Instructor's Persmission
• Other Uses: Graduate Student Research Projects